[D-8-1] Measurements of Anisotropic Biaxial Stresses in x = 0.15 and 0.30 Si1-xGex Nanostructures by Oil-Immersion Raman Spectroscopy

D. Kosemura¹, M. Tomita¹, K. Usuda², T. Tezuka², A. Ogura¹ (1.Meiji Univ., 2.Green Nanoelectronics Collaborative Research Center, AIST , Japan)

https://doi.org/10.7567/SSDM.2012.D-8-1