[D-8-1] Measurements of Anisotropic Biaxial Stresses in x = 0.15 and 0.30 Si1-xGex Nanostructures by Oil-Immersion Raman Spectroscopy

D. Kosemura¹、M. Tomita¹、K. Usuda²、T. Tezuka²、A. Ogura¹ (1.Meiji Univ.、2.Green Nanoelectronics Collaborative Research Center, AIST , Japan)

https://doi.org/10.7567/SSDM.2012.D-8-1