[D-8-2] Role of Ar on Structual Phase Transformation of Sputtered HfO2

T. Iwai¹, Y. Nakajima¹, T. Nishimura¹, K. Nagashio¹, A. Toriumi¹ (1.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.D-8-2