[D-8-4] Analysis of micro-Raman spectra combined with FDTD electromagnetic simulation and FEM stress simulation for local stress distribution in Si MOSFETs

T. Tada¹、A. Satoh¹、H. Arimoto¹、K. Fukuda¹、K. Fujita²、T. Kanayama¹ (1.AIST、2.ASTOM R&D , Japan)

https://doi.org/10.7567/SSDM.2012.D-8-4