[D-8-4] Analysis of micro-Raman spectra combined with FDTD electromagnetic simulation and FEM stress simulation for local stress distribution in Si MOSFETs
T. Tada1, A. Satoh1, H. Arimoto1, K. Fukuda1, K. Fujita2, T. Kanayama1
(1.AIST, 2.ASTOM R&D , Japan)
https://doi.org/10.7567/SSDM.2012.D-8-4
