AN EXTENDED &quot;Y FUNCTION&quot; METHOD FOR SATURATION REGIME CHARACTERIZATION: APPLICATION TO BULK Si AND Ge TECHNOLOGIES

C. Diouf; A. Cros; S. Monfray; J. Mitard; J. Rosa; D. Gloria; G. Ghibaudo

doi:https://doi.org/10.7567/SSDM.2012.E-3-2

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[E-3-2] AN EXTENDED "Y FUNCTION" METHOD FOR SATURATION REGIME CHARACTERIZATION: APPLICATION TO BULK Si AND Ge TECHNOLOGIES

C. Diouf^1,2, A. Cros¹, S. Monfray¹, J. Mitard³, J. Rosa¹, D. Gloria¹, G. Ghibaudo² (1.Indus STMicroelectronics, 2.IMEP lab , FRANCE, 3.IMEC lab , BELGIUM)

https://doi.org/10.7567/SSDM.2012.E-3-2

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