[E-3-2] AN EXTENDED "Y FUNCTION" METHOD FOR SATURATION REGIME CHARACTERIZATION: APPLICATION TO BULK Si AND Ge TECHNOLOGIES

C. Diouf^1,2、A. Cros¹、S. Monfray¹、J. Mitard³、J. Rosa¹、D. Gloria¹、G. Ghibaudo² (1.Indus STMicroelectronics、2.IMEP lab , FRANCE、3.IMEC lab , BELGIUM)

https://doi.org/10.7567/SSDM.2012.E-3-2