The Japan Society of Applied Physics

[F-2-2] A 0.25 μm Gate AlGaN/GaN HEMT for X-band Using RELACS Process

H. Koyama1, Y. Kamo1, S. Miwa1, Y. Yamamoto1, K. Onoe1, A. Inoue1, Y. Hirano1 (1.Mitsubishi Electric Corp., High Frequency &Optical Device Works , Japan)

https://doi.org/10.7567/SSDM.2012.F-2-2