[G-1-5] 3-Dimensional and Defect-free Etching by Neutral Beam for MEMS Applications

T. Kubota^1,2, A. Wada¹, Y. Yanagisawa¹, B. Altansukh¹, K. Miwa², T. Ono¹, S. Samukawa^1,2 (1.Tohoku Univ., 2.BEANS , Japan)

https://doi.org/10.7567/SSDM.2012.G-1-5