[H-4-3] Defect Termination of Flash-Lamp-Crystallized Large-Grain Polycrystalline Silicon Films by High-Pressure Water Vapor Annealing

K. Ohdaira^1,2 (1.Jpn. Adv. Inst. Sci. & Tech., 2.PRESTO, JST , Japan)

https://doi.org/10.7567/SSDM.2012.H-4-3