[H-4-3] Defect Termination of Flash-Lamp-Crystallized Large-Grain Polycrystalline Silicon Films by High-Pressure Water Vapor Annealing K. Ohdaira1,2 (1.Jpn. Adv. Inst. Sci. & Tech.、2.PRESTO, JST , Japan) https://doi.org/10.7567/SSDM.2012.H-4-3
