[H-6-1] Development of magnetic field microscopy for interconnection testing inside passivation layer

K. Kimura¹, Y. Mima¹, N. Oyabu², N. Kimura³, T. Inao⁴ (1.Univ. of Kobe, 2.Univ. of Kyoto, 3.Univ. of Osaka, 4.Murata Manufacturing Company , Japan)

https://doi.org/10.7567/SSDM.2012.H-6-1