[H-6-2] Characterization of Tungsten-Based Pillars Deposited by Helium Ion Microscope Equipped with Gas Injection System

K. Kohama¹、T. Iijima¹、M. Hayashida¹、S. Ogawa¹ (1.AIST , Japan)

https://doi.org/10.7567/SSDM.2012.H-6-2