Development of novel piezoelectric materials for Si-based MEMS application

H. Funakubo; S. Yasui; K. Yazawa; J. Nagata; T. Oikawa; H. Morioka; T. Yamada; H. Uchida

doi:https://doi.org/10.7567/SSDM.2012.I-3-1

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[I-3-1] Development of novel piezoelectric materials for Si-based MEMS application

H. Funakubo¹, S. Yasui¹, K. Yazawa¹, J. Nagata¹, T. Oikawa¹, H. Morioka², T. Yamada^3,4, H. Uchida⁵ (1.Tokyo Tech., 2.Bruker AXS, 3.Nagoya Univ., 4.PRESTO JST, 5.Sophia Univ.)

https://doi.org/10.7567/SSDM.2012.I-3-1

▲