Development of novel piezoelectric materials for Si-based MEMS application

H. Funakubo; S. Yasui; K. Yazawa; J. Nagata; T. Oikawa; H. Morioka; T. Yamada; H. Uchida

doi:https://doi.org/10.7567/SSDM.2012.I-3-1

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[I-3-1] Development of novel piezoelectric materials for Si-based MEMS application

H. Funakubo¹、S. Yasui¹、K. Yazawa¹、J. Nagata¹、T. Oikawa¹、H. Morioka²、T. Yamada^3,4、H. Uchida⁵ (1.Tokyo Tech.、2.Bruker AXS、3.Nagoya Univ.、4.PRESTO JST、5.Sophia Univ.)

https://doi.org/10.7567/SSDM.2012.I-3-1

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