[I-4-1] Droplet etching: Application to Quantum Dots and Nanopillars for Thermoelectrics

C. Heyn¹、D. Sonnenberg¹、A. Graf¹、J. Kerbst¹、T. Bartsch¹、W. Hansen¹ (1.Univ. of Hamburg , Germany)

https://doi.org/10.7567/SSDM.2012.I-4-1