[I-4-1] Droplet etching: Application to Quantum Dots and Nanopillars for Thermoelectrics

C. Heyn¹, D. Sonnenberg¹, A. Graf¹, J. Kerbst¹, T. Bartsch¹, W. Hansen¹ (1.Univ. of Hamburg , Germany)

https://doi.org/10.7567/SSDM.2012.I-4-1