[I-8-2] Controlling Crystallized Domain Positions in Poly-Si Film by using Ni Ferritin for Low Energy Loss and High Efficiency MEMS/NEMS Devices

T. Takashi¹, S. Ogawa¹, S. Kumagai^1,3, I. Yamashita^2,3, Y. Uraoka^2,3, M. Sasaki^1,3 (1.Toyota Technological Inst., 2.Nara Inst. of Science and Tech., 3.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2012.I-8-2