The Japan Society of Applied Physics

[J-2-1] Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors

F. Mailly1、L. Latorre1、P. Nouet1 (1.Laboratoire d'Informatique, de Robotique et de Microelectronique de Montpellier, LIRMM, Univ. Montpellier 2/ CNRS , France)

https://doi.org/10.7567/SSDM.2012.J-2-1