Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors

F. Mailly; L. Latorre; P. Nouet

doi:https://doi.org/10.7567/SSDM.2012.J-2-1

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[J-2-1] Modeling and simulation of CMOS integrated MEMS: application to low-cost sensors

F. Mailly¹, L. Latorre¹, P. Nouet¹ (1.Laboratoire d'Informatique, de Robotique et de Microelectronique de Montpellier, LIRMM, Univ. Montpellier 2/ CNRS , France)

https://doi.org/10.7567/SSDM.2012.J-2-1

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