[J-3-4L] A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer

D. Yamane¹, T. Matsushima², T. Konishi², G. Motohashi¹, H. Ito¹, N. Ishihara¹, H. Toshiyoshi³, K. Machida^1,2, K. Masu¹ (1.Tokyo Inst. Tech., 2.NTT Advanced Tech. Corp., 3.The Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.J-3-4L