A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer

D. Yamane; T. Matsushima; T. Konishi; G. Motohashi; H. Ito; N. Ishihara; H. Toshiyoshi; K. Machida; K. Masu

doi:https://doi.org/10.7567/SSDM.2012.J-3-4L

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[J-3-4L] A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer

D. Yamane¹、T. Matsushima²、T. Konishi²、G. Motohashi¹、H. Ito¹、N. Ishihara¹、H. Toshiyoshi³、K. Machida^1,2、K. Masu¹ (1.Tokyo Inst. Tech.、2.NTT Advanced Tech. Corp.、3.The Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.J-3-4L

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