[K-2-2] Growth of Dense Vertical and Horizontal Graphene for Thermal Vias and its Thermal Property

A. Kawabata¹、T. Murakami¹、M. Nihei¹、N. Yokoyama¹ (1.AIST , Japan)

https://doi.org/10.7567/SSDM.2012.K-2-2