[K-6-3] Fabrication of Bottom Free Magnetic Tunnel Junctions for Bio-Magnetic Field Sensor Application

K. Fujiwara¹, M. Oogane¹, T. Nishikawa², H. Naganuma¹, Y. Ando¹ (1.Tohoku Univ., 2.KONICA MINOLTA Tech. CENTER, Inc. , Japan)

https://doi.org/10.7567/SSDM.2012.K-6-3