[K-6-3] Fabrication of Bottom Free Magnetic Tunnel Junctions for Bio-Magnetic Field Sensor Application

K. Fujiwara¹、M. Oogane¹、T. Nishikawa²、H. Naganuma¹、Y. Ando¹ (1.Tohoku Univ.、2.KONICA MINOLTA Tech. CENTER, Inc. , Japan)

https://doi.org/10.7567/SSDM.2012.K-6-3