[L-3-1] Progress in technologies of fabrication of single-crystal diamond wafers with inch-size area

H. Yamada¹、A. Chayahara¹、Y. Mokuno¹、N. Tsubouchi¹、S. Shikata¹ (1.Diamond Research Lab., AIST, , Japan)

https://doi.org/10.7567/SSDM.2012.L-3-1