[L-3-1] Progress in technologies of fabrication of single-crystal diamond wafers with inch-size area

H. Yamada¹, A. Chayahara¹, Y. Mokuno¹, N. Tsubouchi¹, S. Shikata¹ (1.Diamond Research Lab., AIST, , Japan)

https://doi.org/10.7567/SSDM.2012.L-3-1