Electrical Characteristics of Anatase-TiO2 Films by Low Temperature Fabrication

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

M. Kimura¹, T. Nabatame², H. Yamada¹, A. Ohi², T. Chikyow², T. Ohishi¹ (1.Shibaura Inst. of Tech., 2.National Inst. for Materials Sci. , Japan)