[PS-1-10] Electrical Characteristics of Anatase-TiO2 Films by Low Temperature Fabrication

M. Kimura¹、T. Nabatame²、H. Yamada¹、A. Ohi²、T. Chikyow²、T. Ohishi¹ (1.Shibaura Inst. of Tech.、2.National Inst. for Materials Sci. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-10