The Japan Society of Applied Physics

[PS-1-15] Ultra-High Resolution Depth Profiling of Carrier Concentration in P-implanted Silicon by HREELS

S.J. Park1, N. Uchida1, H. Arimoto1,2, T. Tada1, T. Kanayama1 (1.National Inst. of Advanced Indus. Sci. and Tech., 2.Fujitsu Semiconductor Ltd. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-15