Ultra-High Resolution Depth Profiling of Carrier Concentration in P-implanted Silicon by HREELS

S.J. Park; N. Uchida; H. Arimoto; T. Tada; T. Kanayama

doi:https://doi.org/10.7567/SSDM.2012.PS-1-15

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[PS-1-15] Ultra-High Resolution Depth Profiling of Carrier Concentration in P-implanted Silicon by HREELS

S.J. Park¹, N. Uchida¹, H. Arimoto^1,2, T. Tada¹, T. Kanayama¹ (1.National Inst. of Advanced Indus. Sci. and Tech., 2.Fujitsu Semiconductor Ltd. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-15

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