[PS-1-15] Ultra-High Resolution Depth Profiling of Carrier Concentration in P-implanted Silicon by HREELS

S.J. Park¹、N. Uchida¹、H. Arimoto^1,2、T. Tada¹、T. Kanayama¹ (1.National Inst. of Advanced Indus. Sci. and Tech.、2.Fujitsu Semiconductor Ltd. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-15