[PS-1-16] Characterization of As Implanted and Annealed Ge by Photoemission and Electrical Measurements

T. Ono¹, A. Ohta¹, H. Murakami¹, S. Higashi¹, S. Miyazaki² (1.Hiroshima Univ., 2.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-16