[PS-1-5] High Quality Germanium Dioxide Formation Using Damage-Free and Low-Temperature Neutral Beam Oxidation Process

A. Wada¹、R. Zhang²、S. Takagi²、S. Samukawa¹ (1.Tohoku Univ.、2.The Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.PS-1-5