[PS-10-1] Preparation of a Functionally Graded Fluoropolymer Thin Film and its Application to Antireflective Coating

S. Kazuo^1,2, T. Matsuda¹, T. Kawanishi¹, K. Tanaka¹, H. Usui¹ (1.Tokyo Univ. Agricul. & Technol., 2.Micro Engineering Inc. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-10-1