The Japan Society of Applied Physics

[PS-11-11] Hydrogen Ion Sensing Properties of Niobium Oxide by RTA and Thickness effect

T. W. Chiang1, Y. T. Lin1, M. Y. Shin1, T. W. Juan1, T. C. Chen1, C .H. Lue4, C. S. Lai1,2,3, C. M. Yang1,2,4 (1.Department of Electronic Engineering, Chang Gung Univ., 2.Healthy Aging Research Center, Chang Gung Univ., 3.Center for Biomedical Engineering, Chang Gung Univ., 4.Department of Device Engineering, Inotera Memories Inc. , R.O.C. Taiwan)