[PS-11-16L] Gate Controlled Ionic Transport Nanofluidic Channel Fabricated by Silicon Planer Process

K. Takahashi¹、J. Nishimoto¹、Y. Uemura¹、K. Atsumi¹、T. Hattori¹、M. Futagawa¹、K. Okumura¹、M. Ishida¹、K. Sawada¹ (1.Toyohashi Univ. Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-11-16L