Conductivity Degradation of 4H-SiC Pin Diode with In-grown Stacking Faults

A. Tanaka; K. Nakayama; K. Asano; T. Miyazawa; H. Tsuchida

doi:https://doi.org/10.7567/SSDM.2012.PS-14-5

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[PS-14-5] Conductivity Degradation of 4H-SiC Pin Diode with In-grown Stacking Faults

A. Tanaka¹、K. Nakayama¹、K. Asano¹、T. Miyazawa²、H. Tsuchida² (1.Kansai Electric Power Co., Inc.、2.Central Res. Inst. of Electric Power Industry , Japan)

https://doi.org/10.7567/SSDM.2012.PS-14-5

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