[PS-14-9] LACBED Analysis of Threading Dislocation with c+a Burgers Vector in 4H-SiC

Y. Sugawara¹、M. Nakamori¹、Y. Yao¹、Y. Ishikawa¹、K. Danno²、H. Suzuki²、T. Bessho²、S. Yamaguchi³、K. Nishikawa³、Y. Ikuhara^1,4 (1.Japan Fine Ceramics Center、2.Toyota Motor Corp.、3.Toyota Central Res. and Development Labs. Inc.、4.The Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.PS-14-9