[PS-14-9] LACBED Analysis of Threading Dislocation with c+a Burgers Vector in 4H-SiC

Y. Sugawara¹, M. Nakamori¹, Y. Yao¹, Y. Ishikawa¹, K. Danno², H. Suzuki², T. Bessho², S. Yamaguchi³, K. Nishikawa³, Y. Ikuhara^1,4 (1.Japan Fine Ceramics Center, 2.Toyota Motor Corp., 3.Toyota Central Res. and Development Labs. Inc., 4.The Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.PS-14-9