[PS-2-9] Layered Low-k Porous Silica Zeolite Films for Inter-Metal Dielectric with High Elastic Modulus

T. Yamamoto¹、T. Sato¹、Y. Seino²、K. Hattori²、S. Kuroki¹、T. Kikkawa¹ (1.Hiroshima Univ、2.AIST , Japan)

https://doi.org/10.7567/SSDM.2012.PS-2-9