[PS-6-16] AlGaN MSM Photo Sensors with AlN/SiN Nucleation Layers

C. H. Chen¹, M. H. Yang¹, W. C. Lin¹, C. M. Tsai¹ (1.Cheng Shiu Univ. , Taiwan (R.O.C.))

https://doi.org/10.7567/SSDM.2012.PS-6-16