[PS-6-20] Influence of in situ N2 Plasma Pretreatment on the SiN Prepassivation of AlGaN/GaN HEMT

S. G. Han¹, Y. H. Oh¹, M. Lee¹, D. Kim¹, K. Seo¹ (1.Seoul National Univ. , Korea)

https://doi.org/10.7567/SSDM.2012.PS-6-20