[PS-6-20] Influence of in situ N2 Plasma Pretreatment on the SiN Prepassivation of AlGaN/GaN HEMT

S. G. Han¹、Y. H. Oh¹、M. Lee¹、D. Kim¹、K. Seo¹ (1.Seoul National Univ. , Korea)

https://doi.org/10.7567/SSDM.2012.PS-6-20