Depth-resolved electronic structure analysis of IGZO/SiO2 interface by two-dimensional photoelectron spectroscopy

Y. Ueoka; F. Matsui; N. Maejima; H. Matsui; H. Yamazaki; S. Urakawa; M. Horita; Y. Ishikawa; H. Daimon; Y. Uraoka

doi:https://doi.org/10.7567/SSDM.2012.PS-6-24L

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[PS-6-24L] Depth-resolved electronic structure analysis of IGZO/SiO2 interface by two-dimensional photoelectron spectroscopy

Y. Ueoka¹, F. Matsui¹, N. Maejima¹, H. Matsui¹, H. Yamazaki¹, S. Urakawa¹, M. Horita¹, Y. Ishikawa¹, H. Daimon¹, Y. Uraoka¹ (1.Nara Inst. of Sci. and Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-6-24L

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