Depth-resolved electronic structure analysis of IGZO/SiO2 interface by two-dimensional photoelectron spectroscopy

Y. Ueoka; F. Matsui; N. Maejima; H. Matsui; H. Yamazaki; S. Urakawa; M. Horita; Y. Ishikawa; H. Daimon; Y. Uraoka

doi:https://doi.org/10.7567/SSDM.2012.PS-6-24L

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[PS-6-24L] Depth-resolved electronic structure analysis of IGZO/SiO2 interface by two-dimensional photoelectron spectroscopy

Y. Ueoka¹、F. Matsui¹、N. Maejima¹、H. Matsui¹、H. Yamazaki¹、S. Urakawa¹、M. Horita¹、Y. Ishikawa¹、H. Daimon¹、Y. Uraoka¹ (1.Nara Inst. of Sci. and Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-6-24L

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