GaN-based Metal-Semiconductor-Metal Photodetectors Fabricated on Patterned Sapphire Substrates

K. T. Liu; S. J. Chang; S. Wu; Y. S. Chang

doi:https://doi.org/10.7567/SSDM.2012.PS-6-7

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[PS-6-7] GaN-based Metal-Semiconductor-Metal Photodetectors Fabricated on Patterned Sapphire Substrates

K. T. Liu¹, S. J. Chang², S. Wu³, Y. S. Chang⁴ (1.Univ. of Cheng Shiu, 2.Univ. of National Cheng Kung, 3.Univ. of Tung-Fang Design, 4.Univ. of National Formosa , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-6-7

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