GaN-based Metal-Semiconductor-Metal Photodetectors Fabricated on Patterned Sapphire Substrates

K. T. Liu; S. J. Chang; S. Wu; Y. S. Chang

doi:https://doi.org/10.7567/SSDM.2012.PS-6-7

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[PS-6-7] GaN-based Metal-Semiconductor-Metal Photodetectors Fabricated on Patterned Sapphire Substrates

K. T. Liu¹、S. J. Chang²、S. Wu³、Y. S. Chang⁴ (1.Univ. of Cheng Shiu、2.Univ. of National Cheng Kung、3.Univ. of Tung-Fang Design、4.Univ. of National Formosa , Taiwan)

https://doi.org/10.7567/SSDM.2012.PS-6-7

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