Low-Loss Polycrystalline Silicon Waveguides for High-Efficiency Optical Modulator

T. Horikawa; M. Takahashi; J. Fujikata; S. Takahashi; T. Akagawa; M. Noguchi; N. Yamamoto

doi:https://doi.org/10.7567/SSDM.2012.PS-7-1

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[PS-7-1] Low-Loss Polycrystalline Silicon Waveguides for High-Efficiency Optical Modulator

T. Horikawa^1,2, M. Takahashi^1,2, J. Fujikata^1,3, S. Takahashi^1,3, T. Akagawa^1,3, M. Noguchi^1,3, N. Yamamoto^1,2 (1.PECST, 2.AIST, 3.PETRA , Japan)

https://doi.org/10.7567/SSDM.2012.PS-7-1

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