[PS-7-1] Low-Loss Polycrystalline Silicon Waveguides for High-Efficiency Optical Modulator

T. Horikawa^1,2、M. Takahashi^1,2、J. Fujikata^1,3、S. Takahashi^1,3、T. Akagawa^1,3、M. Noguchi^1,3、N. Yamamoto^1,2 (1.PECST、2.AIST、3.PETRA , Japan)

https://doi.org/10.7567/SSDM.2012.PS-7-1