[PS-7-23] Over 1.5 μm Deep Dry Etching of Al-rich AlGaAs for Photonic Crystal Fabrication

Y. Kitabayashi¹, M. Mochizuki¹, F. Ishikawa¹, M. Kondow¹ (1.Osaka Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-7-23